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https://research.ibm.com/publications/patterning-of-cmos-device-structures-for-40-80nm-pitches-and-beyond
Patterning of CMOS device structures for 40-80nm pitches and beyond for SPIE Advanced Lithography...
Patterning of CMOS device structures for 40-80nm pitches and beyond for SPIE Advanced Lithography 2012 by Sebastian U. Engelmann et al.