https://infoscience.epfl.ch/entities/publication/ea47f13e-beaa-4896-8b47-8720712f826f
Structure and electronic properties of AlCrOxN1-x thin films deposited by reactive magnetron...
In this study, the main attempt is devoted to investigating the microstructure and electronic properties of AlCrOxN1 - x films in a wide range of oxygen...