https://www.nist.gov/publications/ion-energy-distribution-and-optical-measurements-high-density-inductively-coupled-0
Ion Energy Distribution and Optical Measurements in High-Density, Inductively Coupled C4F6...
Feb 17, 2017 - Hexafluoro-1,3 butadiene (C,F,) is a potential new etching gas for the manufacturing ol semiconductors which has a very low global warming potential, unlike com
energy distributionoptical measurements