https://snfguide.stanford.edu/guide/equipment/processing-technique/etching/dry-etching/capacitively-coupled-plasma-etching-ccp?order=field_location&sort=asc
Capacitively Coupled Plasma Etching (CCP) | Stanford Nanofabrication Facility
plasma etchingcoupledccpstanfordnanofabrication
https://meetings-archive.aps.org/gec/2011/jw1/1/
Simulation study of collisionless heating in single-frequency capacitively coupled discharges -...
Stochastic heating is an important phenomenon in low-pressure rf capacitive discharge. Recent theoretical work on this problem using several different approache
simulationstudyheating
https://scholars.lib.ntu.edu.tw/entities/publication/dd504ba3-7658-4333-9cc2-b3a2dc633b6f
An Area-Efficient Capacitively-Coupled Sensor Readout Circuit with Current- Splitting OTA and...
https://tc.copernicus.org/articles/13/2439/2019/tc-13-2439-2019-discussion.html
TC - Peer review - Two-dimensional inversion of wideband spectral data from the capacitively...
Abstract. The DC resistivity method is a common tool in periglacial research because it can delineate zones of large resistivities, which are often associated...
https://research.ibm.com/publications/capacitively-coupled-measurements-on-the-frequency-dependent-diagonal-magnetoconductance-of-a-2deg-in-gaas-heterostructure-in-the-quantum-hall-regime
Capacitively-coupled measurements on the frequency dependent diagonal magnetoconductance of a 2DEG...
Capacitively-coupled measurements on the frequency dependent diagonal magnetoconductance of a 2DEG in GaAs heterostructure in the quantum Hall regime for...
on the
https://www.ojp.gov/library/publications/broadband-capacitively-fed-tapered-type-pifa-modified-ground-plane
Broadband Capacitively Fed Tapered Type PIFA With Modified Ground Plane | Office of Justice Programs
The planar inverted F-antenna (PIFA) described in this article uses a combination of two bandwidth enhancement techniques: patch tapering and the T-shaped...
https://tc.copernicus.org/articles/13/2439/2019/tc-13-2439-2019.html
TC - Two-dimensional inversion of wideband spectral data from the capacitively coupled resistivity...
Abstract. The DC resistivity method is a common tool in periglacial research because it can delineate zones of large resistivities, which are often associated...
https://meetings-archive.aps.org/gec/2012/dt4/5/
Analysis of the phase controlled capacitively coupled plasma using triode circuit model -...
Phase controlled CCP source is attracted recently for high density capacitively coupled VHF plasma source to enhance their poor plasma uniformity due to standin
of the
https://scholars.duke.edu/publication/1271259
Scholars@Duke publication: Capacitively Coupled Arrays of Multiplexed Flexible Silicon Transistors...
scholarsdukepublicationcoupled
https://meetings-archive.aps.org/gec/2009/ktp/29/
Modeling of capacitively coupled radio-frequency discharges in nitrogen - Intellectual Property...
This paper reports the modeling of capacitively coupled radio-frequency discharges (13.56 MHz) in pure nitrogen, produced within a cylindrical parallel-plate re
radio frequencymodelingcoupled
https://collaborate.princeton.edu/en/publications/investigating-instabilities-in-magnetized-low-pressure-capacitive/
Investigating instabilities in magnetized low-pressure capacitively coupled RF plasma using...
low pressureinvestigating
https://meetings-archive.aps.org/gec/2011/sf1/2/
Electron heating and the Electrical Asymmetry Effect in capacitively coupled RF discharges -...
For applications of capacitive radio frequency discharges, the control of particle distribution functions at the substrate surface is essential. Their spatio-te
and the
https://publikationen.bibliothek.kit.edu/1000066516
Capacitively Coupled High-Pressure Lamp Using Coaxial Line Net...
high pressurecoupledlampusingcoaxial
https://repository.lib.ncsu.edu/items/7eea519f-47cc-44a2-8baa-e180a876fa91/full
Electric Field Measurements of the Capacitively Coupled Magnetized RF Sheath Utilizing Passive...
electric fieldof the
https://cir.nii.ac.jp/crid/1050863860427764224?lang=en
Effects of amplitude modulated discharge on growth of nanoparticles in TEOS/O_2/Ar capacitively...
https://meetings-archive.aps.org/gec/2010/tf4/3/
Wafer-level plasma parameters measurements in a multi-frequency capacitively coupled plasma...
Two complications with wafer-level measurements in a CCP discharge are very high DC ($\sim $ -1kV) and RF ($\sim $2kV peak-to-peak) voltages of the substrate, a
in amulti frequencywaferlevelplasma
https://repository.tudelft.nl/record/uuid:5997c139-e9e4-4f81-99db-59a0439138ed
Capacitively-Coupled Chopper Amplifiers | TU Delft Repository
tu delftcoupledchopperamplifiersrepository
https://ojp.gov/library/publications/broadband-capacitively-fed-tapered-type-pifa-modified-ground-plane
Broadband Capacitively Fed Tapered Type PIFA With Modified Ground Plane | Office of Justice Programs
The planar inverted F-antenna (PIFA) described in this article uses a combination of two bandwidth enhancement techniques: patch tapering and the T-shaped...
https://meetings-archive.aps.org/dpp/2025/gp13/12/
Pressure Dependent Plasma Characteristics in an RF Capacitively Coupled DischargeAlyssa...
The effect of pressure on the plasma density and the ion energy distribution function (IEDF) for a capacitively coupled plasma in argon gas is investigated. The
pressuredependentplasmacharacteristicsrf
https://it.mathworks.com/help/antenna/ref/monopoletophat.html
monopoleTopHat - Create capacitively loaded monopole antenna over rectangular ground plane - MATLAB
The default monopoleTopHat object is a top-hat monopole antenna mounted over a rectangular ground plane resonating around 85.2 MHz.
ground planecreateloadedmonopole
https://meetings-archive.aps.org/gec/2012/nw1/13/
Spatial plasma potentials and electron energy distributions in inductively and capacitively coupled...
Spatial profiles of the plasma potential and electron energy distribution function (EEDF) were measured in inductively and capacitively coupled plasmas (ICP and
spatialplasmapotentialselectron
https://meetings-archive.aps.org/gec/2021/dt21/7/
Structural and Electrical Methods for Enhancing Homogeneity in Intermediate Pressure Capacitively...
Capacitively coupled plasma manufacturing processes are ubiquitous in semiconductor fabrication pipelines where control of the radial plasma density profile is
structuralelectricalmethods
https://meetings-archive.aps.org/gec/2015/lw1/23/
Particle-in-cell simulations of a large capacitively coupled plasma discharge - Opening Remarks
A capacitively coupled low-pressure plasma discharge with large electrode radius (25 cm) and a large grounded side chamber radius (25 cm) is simulated with a pa
https://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/1586.html
Sheath Motion in a Capacitively Coupled Radio Frequency Discharges | EECS at UC Berkeley
https://meetings-archive.aps.org/gec/2012/dt4/2/
Tailored Voltage Waveform Capacitively-Coupled Plasmas - Introduction
A major limitation of large-area capacitively-coupled plasmas for materials processing is the inability to increase plasma density without increasing ion bombar
tailoredvoltagewaveformcoupledplasmas
https://meetings-archive.aps.org/gec/2010/dtp/178/
Investigations on metastable helium atoms in a capacitively coupled plasma in a mixture of He, Ar...
https://meetings-archive.aps.org/gec/2023/er4/6/
Two-dimensional kinetic modeling of a weakly magnetized Capacitively Coupled Plasma Discharge in...
Capacitively Coupled Plasma (CCP) discharges are commonly used in the semiconductor industry to etch and deposit materials for microelectronics components. The
https://meetings-archive.aps.org/dpp/2011/tp9/71/
Phase Transitions in a Capacitively Coupled Dusty Plasma with Conducting Dust - Review of Plasma...
Complex plasma is present in a variety of environments including planetary rings, cometary tails, interplanetary clouds and semiconductor manufacturing and fusi
https://www.mdpi.com/1424-8220/20/20/5787
On the Performance of a Capacitively Coupled Electrical Impedance Tomography Sensor with Different...
Capacitively coupled electrical impedance tomography (CCEIT) is a new kind of electrical resistance tomography (ERT) which realizes contactless measurement by...
https://meetings-archive.aps.org/gec/2025/it2/2/
Production of reactive species in capacitively coupled hydrogen plasmas - 78th Annual Gaseous...
Non-equilibrium plasmas that contain hydrogen are of significant interest for basic plasma physics and applications including plasma-enabled materials processin