https://infoscience.epfl.ch/entities/publication/6cf11895-42b5-475f-9ade-07fb656d23fc
DMCMN: In Depth Characterization and Control of AFM Cantilevers With Integrated Sensing and...
New developments in MEMS (microelectromechanical systems) fabrication allowed the development of new types of atomic force microscopy (AFM) sensor with...
in depth