https://research.ibm.com/publications/euvl-mask-process-development-and-verification-using-advanced-modeling-and-characterization-techniques
EUVL mask process development and verification using advanced modeling and characterization...
EUVL mask process development and verification using advanced modeling and characterization techniques for SPIE Advanced Lithography 2020 by Michael Green et...
process developmentadvanced modelingeuvlmaskverification