https://research.ibm.com/publications/layout-based-monte-carlo-simulation-lbmcs-for-complex-back-end-of-line-beol-design-rule-study
Layout based Monte-Carlo simulation (LBMCS) for complex back end of line (BEOL) design rule study...
Layout based Monte-Carlo simulation (LBMCS) for complex back end of line (BEOL) design rule study for IITC 2017 by Dongbing Shao et al.