https://scholarcommons.sc.edu/etd/7616/
"Design and Fabrication of High-Resolution Epitaxial 4H-Sic Metal Insul" by Omerfaruk Karadavut
In the last two decades, significant strides have been made in the epitaxial film growth of 4H-silicon carbide (4H-SiC), establishing it as a premier wide...
design and fabrication