https://open.clemson.edu/all_dissertations/3768/
"NONLINEARITY IN PIEZOTRANSISTIVE III-NITRIDE RESONANT MICROCANTILEVERS" by Ferhat Bayram
Microcantilevers are an important form of microelectromechanical systems (MEMS) and have been widely used in notable applications including bio sensing,...
nonlinearityiiinitrideresonantferhat