https://plasma.oxinst.com/products/rie/plasmapro-800-rie
PlasmaPro 800 RIE - Oxford Instruments
Large capacity open-loading process solutions
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https://plasma.oxinst.com/products/pecvd/plasmapro-100-pecvd
PlasmaPro 100 PECVD - Oxford Instruments
PlasmaPro 100 PECVD process modules are specifically designed to produce excellent uniformity and high rate films, with high-control of film properties.
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