https://research.ibm.com/publications/silessinfgreater2lessinfgreatercllessinfgreater6lessinfgreaterand-silessinfgreater2lessinfgreaterhlessinfgreater6lessinfgreateradsorption-on-caflessinfgreater2lessinfgreatersi111
Si2Cl6and Si2H6adsorption on CaF2/Si(111) for Journal of Vacuum Science and Technology A: Vacuum,...