Robuta

https://research.ibm.com/publications/characterization-of-ultra-thin-soi-and-ssoi-substrates-defect-and-strain-analysis Characterization of ultra thin SOI and SSOI substrates: Defect and strain analysis for ECS Meeting... Characterization of ultra thin SOI and SSOI substrates: Defect and strain analysis for ECS Meeting 2005 by S.W. Bedell et al. https://research.ibm.com/publications/evaluation-of-ssoi-wafers-for-22nm-node-and-beyond Evaluation of sSOI wafers for 22nm node and beyond for S3S 2012 - IBM Research Evaluation of sSOI wafers for 22nm node and beyond for S3S 2012 by F. Allibert et al. https://research.ibm.com/publications/study-of-hcl-and-secco-defect-etching-for-characterization-of-thick-ssoi Study of HCl and secco defect etching for characterization of thick sSOI for JES - IBM Research Study of HCl and secco defect etching for characterization of thick sSOI for JES by A. Abbadie et al.