https://www.vanderbilt.edu/vinse/instrumentation/xef2-vapor-etch_spts_xactix-e2/
XeF2 Vapor Etch | VINSE | Vanderbilt University
Overview The Xactix e2 provides high-selectivity, isotropic xenon difluoride (XeF2) vapor phase etching of silicon, molybdenum, and germanium for MEMS and...
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