https://www.tel.com/news/product/2024/20240708_002.html
Tokyo Electron Launches Acrevia™, a Gas Cluster Beam System for Ultra-Fine Patterning in EUV...
tokyo electron launchesgas
https://www.nist.gov/patents/chip-scale-atomic-beam-system
Chip-Scale Atomic Beam System | NIST
Current atomic beam systems (such as Cs beam tubes for atomic clock) exist either in lab-scale vacuum systems or in custom vacuum tubes
chip scale atomicbeam system