https://www.kth.se/en/2.93875/infrastructure/sample-environments/thin-film-deposition
Magnetron sputtering and cathodic arc ultra-high vacuum deposition system | KTH
This sample environment has been used for assessing the growth of coatings on a substrate, and deposition in multilayer neutron mirrors.
ultra high vacuummagnetron sputteringcathodic arc