https://www.nist.gov/publications/cationic-surfactants-control-overfill-bumps-cu-superfilling
Cationic Surfactants for the Control of Overfill Bumps in Cu Superfilling | NIST
Feb 17, 2017 - Electroanalytical measurements and feature filling experiments have been conducted to study the effect of dodecyltrimethylammonium chloride (DTAC), a quaternary
cationic surfactantsfor the