https://www.research.ed.ac.uk/en/publications/improved-optical-performance-of-silicon-backplane-slms-using-chem/
Improved optical performance of silicon backplane SLMs using chemical-mechanical polishing -...
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https://www.jos.ac.cn/en/article/id/f40d5251-9c52-4aad-96a7-22c32bb1f14b
Study on the Material Removal Mechanism in Chemical Mechanical Polishing at the Molecular Scale
The mechanism of CMP material removal is investigated.Katsuki has proposed wear behavior between a single slurry particle and the wafer surface based on atomic...
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Exergy Analysis of Air Gap Membrane Distillation Unit for Chemical Mechanical Polishing Wastewater...
chemical mechanical polishingair gapmembrane distillationexergyanalysis
https://dspace.mit.edu/entities/publication/ff878405-b074-4a25-9d06-4d1293a049c6
The Effect of Pad-asperity Curvature on Material Removal Rate in Chemical-mechanical Polishing
In chemical-mechanical polishing (CMP), surface asperities of the polishing pad play a key role, for they transmit normal force and impart tangential motion to...
material removal ratechemical mechanical polishingthe effectpadasperity