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https://www.nist.gov/publications/low-loss-superconducting-titanium-nitride-coplanar-waveguide-resonators
Low loss superconducting titanium nitride coplanar waveguide resonators | NIST
Thin films of TiN were sputter-deposited onto Si and sapphire wafers with and without SiN buffer layers.
titanium nitridecoplanar waveguidelowlosssuperconducting
https://www.nist.gov/publications/uncertainties-complex-permittivity-extraction-coplanar-waveguide-scattering-parameter
Uncertainties in Complex Permittivity Extraction From Coplanar Waveguide Scattering-parameter Data...
We analyze the uncertainties of a complex permittivity extraction procedure based on uncorrected scatteringparameter measurements of coplanar waveguides of diff
complex permittivitycoplanar waveguidescattering parameterextraction