https://www.emergentmind.com/papers/2604.19049
Adversarial Multi-Agent LLM Defect Review
The paper introduces an adversarial stage-gated multi-agent review for LLM-assisted defect discovery, validated in security and standards domains.
multi agentdefect reviewadversarialllm
https://www.hitachi-hightech.com/my/en/products/semiconductor-manufacturing/cd-sem/dr-sem/cr7300.html
Defect Review SEM CR7300 Series : Hitachi High-Tech in Malaysia
Inline Review SEM which contributes yield enhancement with high speed ADR and accurate ADC
defect reviewhigh techsemserieshitachi
https://materialsindustry.com/euv-tech-inc-introduces-hvm-ready-euv-zoneplate-microscopy-for-mask-defect-review/
EUV Tech, Inc. Introduces HVM-Ready EUV Zoneplate Microscopy for Mask Defect Review
defect revieweuvtechincintroduces