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https://research.universityofgalway.ie/en/publications/characterisation-of-excimer-lamp-photodeposition-of-ultrathin-oxy/
Characterisation of excimer lamp photodeposition of ultrathin oxynitride films - University of...
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https://scholars.uky.edu/es/publications/development-and-performance-of-a-fluence-rate-distribution-model-/
Development and performance of a fluence rate distribution model for a cylindrical excimer lamp -
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