https://scholarworks.dongguk.edu/item/bbaee7ff-a01a-45c0-8f28-3d5dee20de41
Boosting non-volatile memory performance with exhalative annealing: A novel approach to...
In this study, we propose a CMOS-compatible exhalative annealing (EA) method that can significantly reduce the annealing temperature of Zr-doped hafnia-based...
non volatile memoryboostingperformanceexhalativeannealing