https://arcnl.nl/publications/solid-state-laser-produced-microdroplet-tin-plasma-sources-of-extreme-ultraviolet-radiation
Solid-State-Laser-Produced Microdroplet-Tin Plasma Sources of Extreme Ultraviolet Radiation - ARCNL
Laser-produced tin plasmas are used for the generation of extreme ultraviolet (EUV) light for state-of-The-Art nanolithography. Currently, CO2-gas lasers...
solid state laserextreme ultraviolet radiationplasma sourcesproducedmicrodroplet