https://sts-elionix.com/fluxonium-quantum-qubits/
Fluxonium Quantum Qubits Fabricated with 100 kV EBL System
Nov 25, 2024 - Fluxonium quantum qubits on a chip were patterned using an STS-Elionix ELS-G100 a 100 kV electron beam lithography (EBL) system.
fluxoniumquantumqubitsfabricatedebl