https://www.horiba.com/deu/scientific/applications/semiconductors/pages/high-k-dielectric-with-nanoscale-thickness-studied-by-spectroscopic-ellipsometry-and-ftir-atr/
High-k Dielectric with Nanoscale Thickness Studied by Spectroscopic Ellipsometry
This note shows that the VUV wavelength range of the UVISEL Phase Modulated Ellipsometer is particularly suitable for the accurate characterization of high-k...
high k dielectricnanoscalethicknessstudiedspectroscopic
https://www.nist.gov/publications/spectroscopic-ellipsometry-characterization-high-k-dielectric-hfo2-thin-films-and-high
Spectroscopic Ellipsometry Characterization of High-K Dielectric HfO2 Thin Films and the...
high k dielectricspectroscopic ellipsometry