https://www.nist.gov/publications/monitoring-ion-current-and-ion-energy-during-plasma-processing-using-radio-frequency
To obtain optimal results from plasma processing, the energy of ions incident on the substrate and their current or flux must be carefullymonitored and controll
ion currentplasma processingmonitoringenergyusing
https://www.nist.gov/publications/noninvasive-monitoring-ion-current-and-ion-energy-during-plasma-processing
A technique has been developed for noninvasive monitoring of ion energy and ion current in plasma reactors.
ion currentnoninvasivemonitoringenergyplasma