https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-ipec-472-chemical-mechanical-polisher-cmp
NanoFab Tool: IPEC 472, Chemical Mechanical Polisher (CMP) | NIST
Aug 25, 2025 - The CMP removes material both chemically, by use of a corrosive colloidal slurry, and mechanically, by way of a wafer carrier under controlled pressure rotat
ipec 472toolchemicalmechanicalpolisher