https://uwaterloo.ca/quantum-nano-fabrication-and-characterization-facility/qnc-lab-equipment/lpcvd-silicon-nitride
LPCVD silicon nitride [TYSTAR2-nitride] | Quantum-Nano Fabrication and Characterization Facility |...
Description of the capabilities, features, and available processes for the LPCVD silicon nitride [TYSTAR2-nitride].
lpcvd silicon nitridequantumnanofabricationcharacterization