https://micropneumatics.in/
Micro Pneumatics is a leading manufacturer and supplier of a comprehensive range of control valves including 2 way, 3 way, solenoid Valve, butterfly control...
micropneumaticsvalvesactuatorsmanufacturer
https://www.nist.gov/publications/packaging-plane-micro-actuators-biomems-applications
Two issues related to actuation of in-plane, electro-thermal actuators for BioMEMS applications are addressed.
micro actuatorspackagingplanebiomemsapplications