https://nrc-publications.canada.ca/eng/view/object/?id=65852c4c-ce37-4aff-a42f-101c402dccf7
High-Q/V monolithic diamond microdisks fabricated with quasi-isotropic etching - NRC Publications...
High-Q/V monolithic diamond microdisks fabricated with quasi-isotropic etching
high qisotropic etchingmonolithicdiamondmicrodisks