https://cpb.iphy.ac.cn/en/article/doi/10.1088/1674-1056/18/11/027?viewType=HTML
An efficient numerical approach to electrostatic microelectromechanical system simulation
Computational analysis of electrostatic microelectromechanical systems (MEMS) requires an electrostatic analysis to compute the electrostatic forces acting on...
microelectromechanical systemefficientnumericalapproachelectrostatic
https://telkomnika.uad.ac.id/index.php/TELKOMNIKA/article/view/1740/1862
Research on Electromagnetic Excitation Resonant Sensor Based on Microelectromechanical System | Li...
Research on Electromagnetic Excitation Resonant Sensor Based on Microelectromechanical System
microelectromechanical systemresearchelectromagneticexcitationresonant