https://data.epo.org/publication-server/rest/v1.2/publication-dates/20010725/patents/EP1118910NWA2/document.html
A microlithography projection apparatus - Patent 1118910
A microlithography projection apparatus - Patent 1118910
microlithographyprojectionapparatuspatent
https://books.google.com/books?id=vcVPfTCcQ04C&sitesec=buy&hl=de&source=gbs_atb
Handbook of Microlithography, Micromachining, and Microfabrication ... - P. Rai-Choudhury - Google...
Part of a compilation of diverse information into a single, two-volume resource just at the moment when researchers are weighing the alternatives to visible...
handbookmicrolithographymicromachiningmicrofabricationrai