microlithography - Robuta Search

https://books.google.com/books?id=gGDe2VLcprIC&printsec=frontcover&hl=de&source=gbs_book_other_versions_r&cad=3 Handbook of Microlithography, Micromachining, and Microfabrication - P. Rai-Choudhury - Google Books This volume concentrates on the process technology and device applications associated with micomachining and microfabrication. The handbook is intended... handbook microlithography micromachining https://research.ibm.com/publications/application-of-atomic-force-microscopy-to-phase-shift-masks Application of atomic-force microscopy to phase-shift masks for Microlithography 1992 - IBM Research Application of atomic-force microscopy to phase-shift masks for Microlithography 1992 by A.P. Ghosh et al. https://research.ibm.com/publications/170-nm-gates-fabricated-by-phase-shift-mask-and-top-anti-reflector-process 170 nm gates fabricated by phase-shift mask and top anti-reflector process for Microlithography... 170 nm gates fabricated by phase-shift mask and top anti-reflector process for Microlithography 1993 by T.A. Brunner et al. https://publica.fraunhofer.de/entities/mainwork/e2c23460-81ed-418c-8929-f6432c12a1ca Optical microlithography XIII optical microlithography xiii https://books.google.com/books?id=vcVPfTCcQ04C&printsec=frontcover&hl=de&source=gbs_atb Handbook of Microlithography, Micromachining, and Microfabrication ... - P. Rai-Choudhury - Google... Part of a compilation of diverse information into a single, two-volume resource just at the moment when researchers are weighing the alternatives to visible... handbook microlithography micromachining microfabrication rai https://books.google.com/books?id=vcVPfTCcQ04C&printsec=frontcover&hl=de&source=gbs_ge_summary_r&cad=0 Handbook of Microlithography, Micromachining, and Microfabrication ... - P. Rai-Choudhury - Google... Part of a compilation of diverse information into a single, two-volume resource just at the moment when researchers are weighing the alternatives to visible... handbook microlithography micromachining microfabrication rai https://research.ibm.com/publications/positive-tone-dry-develop-resist-based-on-cross-linking-a-phenolic-resin Positive tone dry-develop resist based on cross-linking a phenolic resin for Microlithography 1993... Positive tone dry-develop resist based on cross-linking a phenolic resin for Microlithography 1993 by Scott A. MacDonald et al. https://research.ibm.com/publications/advanced-negative-resists-using-novel-aminoplast-crosslinkers Advanced negative resists using novel aminoplast crosslinkers for Microlithography 1998 - IBM... Advanced negative resists using novel aminoplast crosslinkers for Microlithography 1998 by Ali Afzali-Kushaa et al. advanced negative resists using novel https://research.ibm.com/publications/model-for-focused-ion-beam-deposition Model for focused ion beam deposition for Microlithography 1990 - IBM Research Model for focused ion beam deposition for Microlithography 1990 by J.P. Levin et al. focused ion beam model deposition microlithography ibm https://research.ibm.com/publications/rational-design-in-cyclic-olefin-resists-for-sub-100nm-lithography Rational design in cyclic olefin resists for sub-100nm lithography for Microlithography 2003 - IBM... Rational design in cyclic olefin resists for sub-100nm lithography for Microlithography 2003 by Wenjie Li et al. https://books.google.com/books?id=vcVPfTCcQ04C&printsec=frontcover&hl=de Handbook of Microlithography, Micromachining, and Microfabrication ... - P. Rai-Choudhury - Google... Part of a compilation of diverse information into a single, two-volume resource just at the moment when researchers are weighing the alternatives to visible... handbook microlithography micromachining microfabrication rai https://publica.fraunhofer.de/entities/event/3e41782c-7dfb-4d9d-b8c2-1bc9f18492d1 Conference "Optical Microlithography" 2002 conference optical microlithography https://research.ibm.com/publications/studies-of-acid-diffusion-in-low-ea-chemically-amplified-photoresists Studies of acid diffusion in low Ea chemically amplified photoresists for Microlithography 2005 -... Studies of acid diffusion in low Ea chemically amplified photoresists for Microlithography 2005 by G.M. Wallraff et al. https://research.ibm.com/publications/multilayer-resist-systems-using-polysiloxanes-as-etch-masks Multilayer resist systems using polysiloxanes as etch masks for Microlithography 1983 - IBM Research Multilayer resist systems using polysiloxanes as etch masks for Microlithography 1983 by J. Paraszczak et al.