https://books.google.com/books?id=vcVPfTCcQ04C&sitesec=buy&hl=de&source=gbs_atb
Handbook of Microlithography, Micromachining, and Microfabrication ... - P. Rai-Choudhury - Google...
Part of a compilation of diverse information into a single, two-volume resource just at the moment when researchers are weighing the alternatives to visible...
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https://research.ibm.com/publications/positive-tone-dry-develop-resist-based-on-cross-linking-a-phenolic-resin
Positive tone dry-develop resist based on cross-linking a phenolic resin for Microlithography 1993...
Positive tone dry-develop resist based on cross-linking a phenolic resin for Microlithography 1993 by Scott A. MacDonald et al.
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