https://pure.bit.edu.cn/zh/publications/an-analytical-electrothermal-model-of-a-1-d-electrothermal-mems-m/
An analytical electrothermal model of a 1-D electrothermal MEMS micromirror - 北京理工大学
model ofanalyticalelectrothermalmemsmicromirror
https://researchdiscovery.drexel.edu/esploro/outputs/conferenceProceeding/Micromirror-array-theory-for-imaging-sensors/991019167910504721
Micromirror array theory for imaging sensors - Drexel University
Jan 22, 2005 - We present a means for forming images using micromirror arrays. Using an array of 2D tilt mirrors it is possible to create an image whose resolution is much...
drexel universitymicromirrorarraytheoryimaging
https://3dim.optics.arizona.edu/publication/nero-2025-simulating/
Simulating the beam steering accuracy and efficiency of a pixelated micromirror phase light...
the beamsimulatingsteeringaccuracyefficiency
https://www.mitacs.ca/our-projects/development-of-high-surface-quality-and-large-static-displacement-translating-micromirror-for-mems-ftirs-with-application-to-alcohol-interlock/
Development of high surface quality and large static displacement translating micromirror for MEMS...
This project is to develop a micromirror with large static translation displacement and high surface quality by combining two microfabrication processes. Based...
surface qualitydevelopmenthighlargestatic