Robuta

https://www.pi-japan.jp/ja/products/nanopositioning-piezo-flexure-stages/xy-piezo-flexure-stages/p-6122-xy-piezo-nanopositioning-system-201740 P-612 XY Piezo Nanopositioner, Compact Precision Stage w/ Aperture piezonanopositionercompactprecisionstage