https://repository.gatech.edu/entities/publication/1310a83c-b4a3-4104-b055-a69909c3a41f
MEMS-based fabrication of power electronics components for advanced power converters
Fabrication technology, based on MEMS processes, for constructing components for use in switched-mode power supplies are developed and presented. Capacitors,...
power electronics componentsfor advancedmemsbasedfabrication