https://en.ygbdt.com/
Shanghai Yinguan Semiconductor | Precision Motion Systems for Semiconductor Equipment - Shanghai...
Yinguan Semiconductor provides high-precision motion systems, vacuum stages, piezo actuators, and chucks for semiconductor metrology, inspection, wafer fab,...
precision motion systemsshanghaisemiconductorequipment
https://research.tue.nl/nl/publications/data-based-control-design-methods-for-lightweight-high-precision-/
Data-based control design methods for lightweight high-precision motion systems - Onderzoeksportaal...
precision motion systemscontrol design
https://dovermotion.com/
Precision Motion Systems and Stages - Dover Motion
Mar 25, 2026 - Our portfolio of precision stages offers many different travels and approaches to X,Y, and Z motion depending on the specific application.
precision motion systemsstagesdover
https://research.utwente.nl/en/publications/attenuation-of-disturbances-introduced-by-dynamic-links-in-precis/
Attenuation of disturbances introduced by dynamic links in precision motion systems using...
precision motion systemsdynamic links