Robuta

https://www.nist.gov/publications/modeling-radiative-properties-silicon-thin-film-coatings-and-experimental-validation Modeling the Radiative Properties of Silicon With Thin-Film Coatings and the Experimental... Oct 12, 2021 - A critical issue for rapid thermal processing (RTP), a single wafer integrated circuit manufacturing process, is how to reduce the temperature measurement uncer properties of siliconthin film coatings