Robuta

https://research.ibm.com/publications/reactive-ion-etching-in-sflessinfgreater6lessinfgreater-gas-mixtures Reactive Ion Etching in SF6 Gas Mixtures for JES - IBM Research reactive ion etchinggas mixtures https://research.ibm.com/publications/mechanism-of-silicon-surface-roughening-by-reactive-ion-etching Mechanism of silicon surface roughening by reactive ion etching for Surface and Interface Analysis... Mechanism of silicon surface roughening by reactive ion etching for Surface and Interface Analysis by Gottlieb S. Oehrlein et al. reactive ion etching https://experts.arizona.edu/en/publications/electron-cyclotron-resonance-reactive-ion-etching-of-gaas-in-chlo/ Electron cyclotron resonance reactive ion etching of GaAs in chlorine-methane - University of... reactive ion etching https://snfguide.stanford.edu/guide/equipment/processing-technique/etching/dry-etching/capacitively-coupled-plasma-etching-ccp/reactive-ion-etching-rie?order=field_location&sort=asc Reactive Ion Etching (RIE) | Stanford Nanofabrication Facility reactive ion etchingriestanfordnanofabricationfacility https://collaborate.princeton.edu/en/publications/molecular-dynamics-simulations-of-direct-reactive-ion-etching-sur/fingerprints/ Molecular dynamics simulations of direct reactive ion etching: surface roughening of silicon by... reactive ion etchingmolecular dynamics https://research.ibm.com/publications/reactive-ion-etching-of-plasma-enhanced-chemical-vapor-deposition-amorphous-silicon-and-silicon-nitride-feeding-gas-effects Reactive ion etching of plasma enhanced chemical vapor deposition amorphous silicon and silicon... Reactive ion etching of plasma enhanced chemical vapor deposition amorphous silicon and silicon nitride: Feeding gas effects for Journal of Vacuum Science and... reactive ion etchingchemical vapor deposition https://research-repository.uwa.edu.au/en/publications/reactive-ion-etching-rie-induced-p-to-n-type-conversion-in-extrin/ Reactive Ion Etching (RIE) Induced p- to n-Type Conversion in Extrinsically Doped p-Type HgCdTe -... reactive ion etching https://publica.fraunhofer.de/entities/publication/094cf81d-5ff7-4a87-aa0c-618d0d333608 Optimizing reactive ion etching to remove sub-surface polishing damage on diamond Low defect smooth substrates are essential to achieve high quality diamond epitaxial growth and high performance devices. The optimization of the Ar/O2/CF4... reactive ion etching https://research.ibm.com/publications/study-of-oxygen-addition-to-cflessinfgreater3lessinfgreaterbr-reactive-ion-etching-plasmas-effects-on-silicon-surface-chemistry-and-etching-behavior Study of oxygen addition to CF3Br reactive ion etching plasmas: Effects on silicon surface... https://research.ibm.com/publications/sidewall-damage-in-nlesssupgreaterlesssupgreater-gaas-quantum-wires-from-reactive-ion-etching Sidewall damage in n+-GaAs quantum wires from reactive ion etching for Applied Physics Letters -... https://www.ideals.illinois.edu/items/14718 Cleaning of tin debris by reactive ion etching in a discharge-produced EUV plasma source | IDEALS https://repository.gatech.edu/entities/publication/09c6fa48-ae70-426a-94c5-b0e7bffcb3f1 In situ monitoring of reactive ion etching using a surface micromachined integrated resonant sensor This research explores a novel in-situ technique for monitoring film thickness in the reactive etching process that incorporates a micromachined sensor. The... https://research.ibm.com/publications/reactive-ion-etching-of-gaas-in-chlorine-and-resulting-surface-damage Reactive Ion Etching of GaAs in Chlorine and Resulting Surface Damage for JES - IBM Research Reactive Ion Etching of GaAs in Chlorine and Resulting Surface Damage for JES by B.S. Lee et al. https://research.ibm.com/publications/conductance-considerations-in-the-reactive-ion-etching-of-high-aspect-ratio-features Conductance considerations in the reactive ion etching of high aspect ratio features for Applied... Conductance considerations in the reactive ion etching of high aspect ratio features for Applied Physics Letters by J.W. Coburn et al. https://research.ibm.com/publications/a-study-of-cclflessinfgreater3lessinfgreaterhlessinfgreater2lessinfgreater-reactive-ion-etching-damage-and-contamination-effects-in-silicon A study of CClF3/H2 reactive ion etching damage and contamination effects in silicon for Journal of... https://research-repository.uwa.edu.au/en/publications/transport-properties-of-reactive-ion-etching-induced-p-to-n-type-/ Transport Properties of Reactive-Ion-Etching-Induced p-to-n Type Converted Layers in HgCdTe - the...