https://vonardenne.us/products/va-procos-2-1/
Process Control System for Reactive Sputtering: VA
VA PROCOS 2 is a modular process control system specifically designed for stabilizing reactive sputtering processes in critical transition mode.
process control systemreactive sputteringva
https://researchwith.stevens.edu/en/publications/morphological-evolution-of-zno-thin-films-deposited-by-reactive-s/
Morphological Evolution of ZnO Thin Films Deposited by Reactive Sputtering - Stevens Institute of...
thin films
https://publica.fraunhofer.de/entities/publication/45553390-9547-403b-9b13-56bb9ca29eea
Stabilization of high-deposition-rate reactive magnetron sputtering of oxides by in situ...