https://sfera.unife.it/handle/11392/1203118
Gas-sensing applications of W-Ti-O-based nanosized thin films prepared by r.f. reactive sputtering
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https://www.advancedenergy.com/de-de/about/news/blog/controlling-reactive-sputtering-processes-why-voltage-control/
Controlling Reactive Sputtering Processes: Why Voltage Control? | Advanced Energy
Reactive sputtering is used for a tremendous variety of industrial coating applications.
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https://pure.kfupm.edu.sa/en/publications/tin-fe-nanocomposite-thin-films-deposited-by-reactive-magnetron-s/
TiN-Fe nanocomposite thin films deposited by reactive magnetron sputtering - King Fahd University...
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https://www.kdf.com/products/in-line-products-kdf-technologies/kdf-sputtering-solutions/
KDF Sputtering Technology | Reactive Sputtering, LMM & PEM | KDF Technologies
KDF's reactive sputtering systems use patented LMM cathodes, PEM control, and Pulsed DC power supplies for stable, high-rate dielectric film deposition.
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