https://research.tudelft.nl/en/publications/metalsilicon-schottky-barrier-lowering-by-rtcvd-interface-passiva/
Metal/silicon Schottky barrier lowering by RTCVD interface passivation - TU Delft Research Portal
https://drum.lib.umd.edu/items/7cc0c581-5bc2-4fa0-a64c-7a4ca8e8fa32/full
Polysilicon RTCVD Process Optimization for Environmentally- Conscious Manufacturing
In the semiconductor manufacturing industry, optimization of advanced equipment and process designs must include both manufacturing metrics (such as cycle...
process optimizationenvironmentally consciouspolysiliconrtcvdmanufacturing
https://collaborate.princeton.edu/en/publications/the-growth-of-ultra-uniform-b-doped-sisige-multiple-quantum-wells/fingerprints/
The growth of ultra-uniform B-doped Si/SiGe multiple quantum wells by RTCVD for mid-IR applications...