https://meetings-archive.aps.org/mar/2010/b15/10/
Spatial Resolution of Electrical Measurements Performed with Scanning Probe Microscopes as a...
Scanning capacitance microscopy and Scanning Kelvin force microscopy are used to measure complex dopant profiles in semiconductors and surface potential/work fu
scanning probe microscopesspatial resolutionelectrical measurements
https://www.semanticscholar.org/topic/Scanning-Probe-Microscopes-%28device%29/115677
Scanning Probe Microscopes (device) | Semantic Scholar
A microscope that forms images of surfaces using a physical probe that scans the specimen and records the probe-surface interaction as a function of position.
scanning probe microscopesdevicesemanticscholar