https://saemobilus.sae.org/papers/cast-densified-silicon-carbides-790253
790253: Cast Densified Silicon Carbides - Technical Paper
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https://silvaco.com/zh-hans/simulation-standard-zh-hans/using-athena-monte-carlo-module-for-ion-implantation-simulation-in-silicon-carbides/
Using Athena Monte Carlo Module for Ion Implantation Simulation in Silicon Carbides - Silvaco
Oct 13, 2021 - The Monte Carlo Implantation Module of ATHENA has proved to be a very accurate tool for simulation of various implantation processes.
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