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https://www.stsci.edu/stsci/meetings/space_detectors/x-band_figure_1.htm Fabrication Technology for Single Electron Transistors and Submillimeter Detectors - Figure 1 single electron transistors fabrication technology https://www.stsci.edu/stsci/meetings/space_detectors/x-band_figure_3.htm Fabrication Technology for Single Electron Transistors and Submillimeter Detectors - Figure 3 single electron transistors fabrication technology