https://publica.fraunhofer.de/entities/publication/5826764e-a49a-4d06-b82c-140e3df42f41
Characterization of nanoscale gratings by spectroscopic reflectometry in the extreme ultraviolet...
The authors present a study on the dimensional characterization of nanoscale line gratings by spectroscopic reflectometry in the extreme ultraviolet spectral...
spectroscopic reflectometryin thecharacterizationnanoscalegratings