Robuta

https://www.uni-augsburg.de/en/fakultaet/mntf/physik/groups/exp4/equipment/magnetron-sputter-deposition-system/ Magnetron sputter deposition system sputter deposition magnetron system https://www.muni.cz/en/research/publications/1590076 Multi-component (Al,Cr,Nb,Y,Zr)N thinfilms by reactive magnetron sputter deposition for increased...