Robuta

https://www.nist.gov/publications/extending-single-photon-optimized-superconducting-transition-edge-sensors-beyond-0
We illuminate a photon-number-resolving transition edge sensor with strong pulses of light containing up to 6.7 million photons (0.85 pJ per pulse).
transition edge sensorssingle photonextendingoptimizedsuperconducting