https://www.nist.gov/publications/spectroscopic-ellipsometry-ta205-si-ultrathin-sio2-and-high-k-materials-ulsi-gate
Spectroscopic Ellipsometry of Ta205 On Si, in Ultrathin SiO2 and High-K Materials for ULSI Gate...
Oct 12, 2021 - In this paper, we present the results of spectroscopic ellipsometry (SE) studies of Ta205 films on Si.
https://www.ibs.it/libri-inglese/science-computer-technology/electronics-circuits-vlsi-ulsi-c53494
Electronics / Circuits / VLSI & ULSI - Libri in inglese | IBS
libri in ingleseelectronics circuitsvlsiulsiibs
https://www.nist.gov/publications/high-resolution-x-ray-scattering-methods-ulsi-materials-characterization-and-metrology
High Resolution X-ray Scattering Methods for ULSI Materials Characterization and Metrology for ULSI...
Oct 16, 2008 - X-ray analytical methods with high angular resolution are becoming increasingly important for the characterization of materials used in ULSI fabrication.
x ray scatteringhigh resolution