https://ircommons.uwf.edu/esploro/outputs/journalArticle/MEMS-Scale-Angular-Position-Sensor-Based-on/99380175950906600
MEMS-Scale Angular Position Sensor Based on Ultracapacitor Technology - University of West Florida
This paper introduces a new angular position sensor that measures 3 mm (diameter) by 0.5 mm (thickness); and it is therefore a MEMS scale sensor. The sensor's...
position sensorultracapacitor technologyuniversity ofwest floridamems