Robuta

https://pure.psu.edu/en/publications/sup3suphe-refrigerator-based-very-low-temperature-scanning-tunnel/ 3He refrigerator based very low temperature scanning tunneling microscope - Penn State very low temperature refrigerator based https://research.utwente.nl/en/publications/low-temperature-sacrificial-wafer-bonding-for-planarization-after/ Low temperature sacrificial wafer bonding for planarization after very deep etching - University of... https://pubchem.ncbi.nlm.nih.gov/patent/EP-1809956-B1 Production of very low-temperature refrigeration in a thermochemical device - Patent EP-1809956-B1... EP-1809956-B1 chemical patent summary.