Robuta

https://scholarsmine.mst.edu/chem_facwork/1009/ "Deep-ultraviolet Antireflective Coating with Improved Conformality, Op" by Douglas J. Guerrero,... A new bottom antireflective coating (BARC) for 248 nm lithography is described. The new coating has an optical density of approximately 10/micrometers (k... deep ultraviolet antireflective coating douglas j improved conformality https://pure.bit.edu.cn/en/publications/optimization-of-double-bottom-antireflective-coating-for-hyper-nu/ Optimization of double bottom antireflective coating for hyper numerical aperture lithography -... double bottom antireflective coating numerical aperture optimization hyper