https://scholar.hit.edu.cn/en/publications/a-sigma-delta-interface-asic-for-force-feedback-micromachined-cap/
A sigma-delta interface ASIC for force-feedback micromachined capacitive accelerometer - Harbin...
capacitive accelerometersigmadeltainterfaceasic
https://research.ucc.ie/en/publications/a-micromachined-wide-band-in-plane-single-axis-capacitive-acceler/fingerprints/
A micromachined wide-band in-plane single-axis capacitive accelerometer with a...
wide bandcapacitive accelerometerplanesingleaxis
https://ijettjournal.org/archive/ijett-v69i10p211
Design, Modelling, and Simulation analysis of a Single Axis MEMS-based Capacitive Accelerometer
This paper presents the design, simulation, and analytical modeling of the single proposed axis MEMSbased capacitive accelerometer. Analytical modeling has...
modelling and simulationcapacitive accelerometerdesignanalysissingle
https://www.ion.org/publications/abstract.cfm?articleID=15660
A Piezo-Capacitive BAW Accelerometer with Extended Dynamic Range using a Gap-Changing Moving...
dynamic rangepiezocapacitivebawaccelerometer
https://www.engineering.org.cn/sscae/EN/1160104261013005055
An Area Changeable Capacitive Micro-machined Accelerometer
In this paper, a newly developed accelerometer based on the principle of area changeable capacitance is presented at the first time. The movable mass is...
areacapacitivemicromachinedaccelerometer